The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
May. 04, 2005
Mao-nan Chang, Hsinchu, TW;
Mao-Nan Chang, Hsinchu, TW;
National Applied Research Laboratories, Taipei, TW;
Abstract
An electrical scanning probe microscope (SPM) apparatus. The SPM apparatus is equipped with an atomic force microscope with an infrared laser source, a position-sensitive photo-detector (PSPD) to provide a topographic image, a charge-coupled device (CCD) monitor for optical alignment, and an electrical scanning sensor operatively coupled to the atomic force microscope to acquire synchronous two-dimensional electrical images. The photoperturbation effects induced by stray light and perturbation of the contrast of SCM images can thus be ameliorated.
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