The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 20, 2007
Filed:
Jun. 10, 2003
Katsuya Okumura, Tokyo, JP;
Motosuke Miyoshi, Tokyo, JP;
Katsuya Okumura, Tokyo, JP;
Motosuke Miyoshi, Tokyo, JP;
Toudai TLO, Ltd., Tokyo, JP;
Abstract
The present invention provides an electron optical lens column suitable for miniaturization, and provides the manufacturing method thereof. The column unit () comprises an inner column () and an outer column (). The column unit is, as a whole, structured from a high-resistance electrically conductive ceramic. Electrostatic lenses (, and) are affixed to the inner surface () of the inner column using a means such as plating or vapor deposition. Of the electrodes or electrode parts (, and) from which the lens is structured, those that share the same electric potential are connected by shared interconnections. This makes it possible to connect all of the electrodes or electrode parts with shared electric potentials as a group to the external interconnections.