The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 13, 2007
Filed:
Feb. 10, 2004
Toshihiko Takeda, Kanagawa, JP;
Masaru Kamio, Kanagawa, JP;
Masataka Yamashita, Kanagawa, JP;
Yasue Sato, Tokyo, JP;
Hitoshi Oda, Kanagawa, JP;
Keisuke Yamamoto, Kanagawa, JP;
Miki Tamura, Kanagawa, JP;
Hideshi Kawasaki, Tokyo, JP;
Kazuhiro Jindai, Kanagawa, JP;
Toshihiko Takeda, Kanagawa, JP;
Masaru Kamio, Kanagawa, JP;
Masataka Yamashita, Kanagawa, JP;
Yasue Sato, Tokyo, JP;
Hitoshi Oda, Kanagawa, JP;
Keisuke Yamamoto, Kanagawa, JP;
Miki Tamura, Kanagawa, JP;
Hideshi Kawasaki, Tokyo, JP;
Kazuhiro Jindai, Kanagawa, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention provides an electron source manufacturing apparatus which can be easily downsized and operated. The electron source manufacturing apparatus includes a support member for supporting a substrate () having a conductor (), a vessel () which has a gas inlet port () and a gas exhaust port () and covers a partial region of the surface of the substrate (); a gas inlet unit () connected to the gas inlet port () to introduce gas into the vessel, an exhaust unit () connected to the gas exhaust port to evacuate the interior of the vessel, and a voltage application unit () for applying a voltage to the conductor.