The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Jun. 10, 2002
Masanobu Kataoka, Miyazaki, JP;
Kiichiro Nemoto, Kawasaki, JP;
Masanobu Kataoka, Miyazaki, JP;
Kiichiro Nemoto, Kawasaki, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A focal detecting means () of a controller () controls an actuator driver () to actuate an actuator () to vibrate an objective lens () in a direction along an optical axis. An output of a focus error signal from a signal generator () is checked by a signal detecting means () and presence of a workpiece is determined when the signal is detected. When the presence of the workpiece is detected, the focal detecting means () moves the objective lens () along the optical axis by the actuator () and a focus position is recognized with reference to a position signal from a position detecting means () together with the focus error signal, where the objective lens () is moved to the focus position for focusing.