The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Dec. 17, 2003
Chia-chen Liu, Hsinchu, TW;
Chia-Chen Liu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Abstract
A new method to form a floating gate for a flash memory device is achieved. The method comprises forming a gate dielectric layer overlying a substrate. A first conductor layer is deposited overlying the gate dielectric layer. A masking layer is formed overlying the first conductor layer. The masking layer and first conductor layer are etched through. A second conductor layer is deposited overlying the masking layer, the first conductor layer, and the substrate. The second conductor layer is etched down to form spacers on the sidewalls of the first conductor layer and the masking layer. The spacers extend vertically above the top surface of the first conductor layer. The masking layer is etched away to complete said floating gate.