The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 06, 2007
Filed:
Oct. 13, 2004
John Francis Kirner, Orefield, PA (US);
James Edward Macdougall, New Tripoli, PA (US);
Brian Keith Peterson, Fogelsville, PA (US);
Scott Jeffrey Weigel, Allentown, PA (US);
Thomas Alan Deis, Vista, CA (US);
Martin Devenney, Mountain View, CA (US);
C. Eric Ramberg, San Jose, CA (US);
Konstantinos Chondroudis, Sunnyvale, CA (US);
Keith Cendak, Millbrae, CA (US);
John Francis Kirner, Orefield, PA (US);
James Edward MacDougall, New Tripoli, PA (US);
Brian Keith Peterson, Fogelsville, PA (US);
Scott Jeffrey Weigel, Allentown, PA (US);
Thomas Alan Deis, Vista, CA (US);
Martin Devenney, Mountain View, CA (US);
C. Eric Ramberg, San Jose, CA (US);
Konstantinos Chondroudis, Sunnyvale, CA (US);
Keith Cendak, Millbrae, CA (US);
Air Products And Chemicals, Inc., Allentown, PA (US);
Abstract
Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same. These materials are characterized as having a dielectric constant (κ) a dielectric constant of about 3.7 or less; a normalized wall elastic modulus (E'), derived in part from the dielectric constant of the material, of about 15 GPa or greater; and a metal impurity level of about 500 ppm or less. Low dielectric materials are also disclosed having a dielectric constant of less than about 1.95 and a normalized wall elastic modulus (E′), derived in part from the dielectric constant of the material, of greater than about 26 GPa.