The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Aug. 04, 2005
Applicants:
Seung-jun Lee, Seoul, KR;
Hak-yong Kim, Suwon-si, KR;
Yoo-seok Jang, Seoul, KR;
Chang-hun Park, Hwaseong-si, KR;
Seung-yong Doh, Seoul, KR;
Inventors:
Seung-jun Lee, Seoul, KR;
Hak-yong Kim, Suwon-si, KR;
Yoo-seok Jang, Seoul, KR;
Chang-hun Park, Hwaseong-si, KR;
Seung-Yong Doh, Seoul, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of compensating sensor data and a method of evaluating an interlock of an interlock system, in which an allowable variation between sensors varying depending on a driving time for a set of equipment, an RF time, the number of wafers, etc. is minimized, thereby enhancing detection reliability of a defective wafer.