The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Sep. 17, 2005
Dave Camm, Vancouver, CA;
Mike Krasnich, Richmond, CA;
Miaden Bumbulovic, Vancouver, CA;
Sergiy Dets, Richmond, CA;
Steve Mccoy, Buraby, CA;
Dave Camm, Vancouver, CA;
Mike Krasnich, Richmond, CA;
Miaden Bumbulovic, Vancouver, CA;
Sergiy Dets, Richmond, CA;
Steve McCoy, Buraby, CA;
Mattson Technology, Inc., Fremont, CA (US);
Abstract
A heating arrangement heats a first major surface of a workpiece with an illumination energy such that a first portion of the illumination energy is directly incident upon the first major surface of the workpiece and a second portion of the illumination energy is directed such that, at least initially, the second portion would miss the first major surface. A reflector, having a central opening, reflects at least some of the second portion of the illumination energy onto the peripheral edge region of the workpiece for preheating compensation. The reflector is configured for shadow-free exposure of a second, opposing major surface of the workpiece to a flash heating energy. A workpiece manipulation arrangement is described to provide for dynamic preheating movement to vary a heating profile across the workpiece and, thereafter, move the workpiece to a flash heating position. Automatic workpiece centering is featured by the manipulation arrangement.