The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Mar. 24, 2004
Johannes Martinus Duisters, Budel-Schoot, NL;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Wilfred Edward Endendijk, Steensel, NL;
Johannes Martinus Duisters, Budel-Schoot, NL;
Johannes Adrianus Antonius Theodorus Dams, Veldhoven, NL;
Wilfred Edward Endendijk, Steensel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic optical system is presented herein. The optical system comprises a housing with two optically transparent windows and at least one moveable lens therein, as well as at least one other optical element outside said housing. By providing at least one optical element outside the housing, possible deleterious influences thereof on the optical quality of the moveable lens may be diminished. The housing with the moveable lens may be purged, and may be provided with a linear motor and a gas bearing for contactless moving of the lens.