The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2007
Filed:
Nov. 06, 2003
Lucas Koorneef, Eindhoven, NL;
Joroen Van Aert, Eindhoven, NL;
Frans Van Deuren, Valkenswaard, NL;
Sanders Broers, Eindhoven, NL;
Lucas Koorneef, Eindhoven, NL;
Joroen van Aert, Eindhoven, NL;
Frans van Deuren, Valkenswaard, NL;
Sanders Broers, Eindhoven, NL;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
An actuator for positioning of an optical element, such as a mirror, in an optic system that operates under vacuum conditions is provided and includes a first actuator body including a first actuator element that is hermetically sealed in the first actuator body and a second actuator body that includes a second actuator element that is hermetically sealed in the second actuator body. The first and second actuator bodies are hermetically sealed using any number of techniques including a welding process. Moreover, in one embodiment, the actuator operates under the Lorentz principle and the first actuator element is a magnet or magnet assembly and the second actuator element is a coil assembly with the first and second actuator bodies being free of attachment to one another.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile