Method of forming non-volatile memory cell using sacrificial pillar spacers and non-volatile memory cell formed according to the method

Abstract

A method of forming a microelectronic non-volatile memory cell, a memory cell formed according to the method, and a system including the memory cell. The method comprises: providing a substrate; providing a pair of spaced apart isolation bodies on the substrate, the isolation bodies including respective raised isolation portions, providing the pair comprising providing a buffer layer on the substrate; providing pillar spacers on side walls of the raised isolation portions; removing the buffer layer after providing the pillar spacers; removing the pillar spacers during removing the buffer layer; providing a tunnel dielectric on the surface of the substrate after removing the buffer layer; providing a floating gate on the tunnel dielectric; reducing a height of the isolation bodies to yield corresponding isolation regions; providing source and drain regions on opposite sides of the floating gate; providing an interpoly dielectric on the floating gate; and providing a control gate on the interpoly dielectric to yield the memory cell.