The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 20, 2007
Filed:
Mar. 05, 2004
Philippe Robert, Grenoble, FR;
Grégory Caruyer, Goncelin, FR;
Pascal Ancey, Revel, FR;
Guillaume Bouche, Grenoble, FR;
Philippe Robert, Grenoble, FR;
Grégory Caruyer, Goncelin, FR;
Pascal Ancey, Revel, FR;
Guillaume Bouche, Grenoble, FR;
STMicroelectronics S.A., Montrouge, FR;
Commissariat a l'Energie Atomique, Paris Cedex, FR;
Abstract
A process for manufacturing a resonator including the steps of: forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion; forming an insulating layer having its upper surface flush with the upper part of the second portion; forming by a succession of depositions and etchings a beam of a conductive material above the second portion, the beam ends being on the insulating layer on either side of the second portion, the upper surface of the second portion being exposed on either side of the beam, a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion; and removing the second portion.