The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Oct. 01, 2004
Jacob Frederik Friso Klinkhamer, Delft, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
Jacob Frederik Friso Klinkhamer, Delft, NL;
Anastasius Jacobus Anicetus Bruinsma, Delft, NL;
Martinus Hendrikus Antonius Leenders, Rotterdam, NL;
Hubert Adriaan Van Mierlo, Maassluis, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An embodiment of the invention may be applied to measure the positions of features in a alignment region on a mask with a sensor. The positions of the features in the alignment region are known from the design. A feature of which the position is measured, is identified by comparing the relative positions between measured features with relative positions known from the design. The known position of the identified feature is subtracted from a measured position of the identified feature to give the position of the mask.