The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 13, 2007
Filed:
Oct. 29, 2003
Naoya Sashida, Kawasaki, JP;
Katsuyoshi Matsuura, Kawasaki, JP;
Yoshimasa Horii, Kawasaki, JP;
Masaki Kurasawa, Kawasaki, JP;
Kazuaki Takai, Kawasaki, JP;
Naoya Sashida, Kawasaki, JP;
Katsuyoshi Matsuura, Kawasaki, JP;
Yoshimasa Horii, Kawasaki, JP;
Masaki Kurasawa, Kawasaki, JP;
Kazuaki Takai, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
There are provided a step of forming an insulating film over a semiconductor substrate, a step of exciting a plasma of a gas having a molecular structure in which hydrogen and nitrogen are bonded and then irradiating the plasma onto the insulating film, a step of forming a self-orientation layer made of substance having a self-orientation characteristic on the insulating film, and a step of forming a first conductive film made of conductive substance having the self-orientation characteristic on the self-orientation layer.