The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Jan. 21, 2005
Masatsugu Yamashita, Wako, JP;
Kodo Kawase, Wako, JP;
Masayoshi Tonouchi, Suita, JP;
Toshihiro Kiwa, Suita, JP;
Kiyoshi Nikawa, Kanagawa, JP;
Masatsugu Yamashita, Wako, JP;
Kodo Kawase, Wako, JP;
Masayoshi Tonouchi, Suita, JP;
Toshihiro Kiwa, Suita, JP;
Kiyoshi Nikawa, Kanagawa, JP;
Riken, Saitama, JP;
NEC Electronics Corporation, Kanagawa, JP;
Abstract
An apparatus for diagnosing a fault in a semiconductor device includes an laser applying unit, a detection/conversion unit, and a fault diagnosis unit. The semiconductor device is held at a state where no bias voltage is applied thereto. The laser applying unit then applies a pulse laser beam having a predetermined wavelength to the semiconductor device so as to two-dimensionally scan the semiconductor device with the pulse laser beam. The detection/conversion unit detects an electromagnetic wave generated from a laser applied position in the semiconductor device, and converts the detected electromagnetic wave into a time-varying voltage signal that corresponds to a time-varying amplitude of an electric field of the electromagnetic wave. The fault diagnosis unit derives an electric field distribution in the semiconductor device on the basis of the time-varying voltage signal to perform fault diagnosis on the semiconductor device.