The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Oct. 06, 2004
Applicants:
Haowen Bu, Plano, TX (US);
Clinton L. Montgomery, Coppell, TX (US);
Amitabh Jain, Allen, TX (US);
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
An embodiment of the invention is a method of making a semiconductor structurewhere the spacer oxide layeris formed by a hydrogen free precursor CVD process. Another embodiment of the invention is a semiconductor structurehaving a spacer oxide layerwith a hydrogen content of less than 1%.