The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Jun. 09, 2004
Applicant:
Yi-chang Tsai, Bao Shan Township, TW;
Inventor:
Yi-Chang Tsai, Bao Shan Township, TW;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); G02B 7/04 (2006.01); G01N 23/225 (2006.01);
U.S. Cl.
CPC ...
Abstract
An automatically aligning objective aperture assembly for a CDSEM includes a plate that is moveable in X and Y directions relative to an electron beam generated by the SEM. The plate defines one or more objective apertures. Encoders and motors are provided for affecting movement of the plate in the X and Y directions. An image controller, responsive to an image of a semiconductor wafer feature focused upon by the electron beam, controls the encoders and motors in a manner which affects movement of the plate to automatically align the objective aperture with the electron beam.