The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 06, 2007
Filed:
Feb. 14, 2003
Edvard Kälvesten, Edelcrantzvägen, SE;
Thorbjörn Ebefors, Kallkärrsvägen, SE;
Niklas Svedin, Karlavägen, SE;
H{dot Over (A)}kan Westin, Prinsgatan, SE;
Edvard Kälvesten, Edelcrantzvägen, SE;
Thorbjörn Ebefors, Kallkärrsvägen, SE;
Niklas Svedin, Karlavägen, SE;
H{dot over (a)}kan Westin, Prinsgatan, SE;
Silex Microsystems AB, Jarfalla, SE;
Abstract
A method of making a deflectable, free hanging micro structure having at least one hinge member, the method includes the steps of providing a first sacrificial wafer having a single crystalline material constituting material forming the micro structure. A second semiconductor wafer including necessary components for forming the structure in cooperation with the first wafer is provided. Finite areas of a structured bonding material is provided, on one or both of the wafers at selected locations, the finite areas defining points of connection for joining the wafers. The wafers are bonded using heat and optionally pressure. Sacrificial material is etched away from the sacrificial wafer, patterning the top wafer by lithography is performed to define the desired deflectable microstructures having hinges, and subsequently silicon etch to make the structures.