The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
Jun. 03, 2003
Kiichi Ishikawa, Kanagawa, JP;
Kiichi Ishikawa, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
A method of inspection for detecting pattern defects in a mask used for transferring a predetermined pattern of regions passing and blocking an exposure beam, comprising the steps of presetting different acceptable defect sizes for a plurality of conditions different in the line and/or space of the pattern, detecting a defect and recognizing the line and space of the pattern at the defect part, selecting an acceptable defect size corresponding to the line and space of the pattern recognized at the defect part and comparing it with the size of the detected defect, and determining a defect larger than the acceptable defect size as a defect requiring repair; a mask defect inspection system for inspection according to the method, and a mask production method including a step of the inspection.