The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
Jun. 24, 2004
Applicants:
Thomas Engel, Erfurt-Niedemissa, DE;
Wolfgang Harnisch, Lehesten, DE;
Roland Scheler, Jena, DE;
Inventors:
Assignee:
Carl Zeiss Jena GmbH, Jena, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 13/20 (2006.01); G02B 21/06 (2006.01); G02B 5/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
A microscope, especially a microscope that is used for inspection in semiconductor manufacture is disclosed. The microscope comprises a pulsed laser for the purpose of illumination, preferably in the UV range. At least one rotating diffusion disk is disposed downstream of the laser so as to homogenize the illumination. Preferably, two rotating diffusion disks of opposite rotational sense are disposed in the illumination beam path either directly or indirectly one behind the other.