The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
Jul. 04, 2004
Applicants:
Blaine D. Johs, Lincoln, NE (US);
Gregory K. Pribil, Lincoln, NE (US);
Inventors:
Blaine D. Johs, Lincoln, NE (US);
Gregory K. Pribil, Lincoln, NE (US);
Assignee:
J.A. Woollam Co., Inc., Lincoln, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01B 11/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
Determination of thin metal film dielectric function and layer thicknesses using simultaneous transmission spectroscopic ellipsometric (SE) and transmission intensity (T) measurements obtained in-situ to break correlation between thickness and optical constants of very thin absorbing films, preferably using only A.C. Components of ellipsometric and intensity characterizing electromagnetic radiation which transmits through said substrate and enters a detector.