The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
Sep. 10, 2004
Applicants:
Alan Janos, Darnestown, MD (US);
Malcolm Pack, Frederick, MD (US);
Mohammad Kamarchi, Gaithersburg, MD (US);
Michael B. Colson, Woodbine, MD (US);
Inventors:
Alan Janos, Darnestown, MD (US);
Malcolm Pack, Frederick, MD (US);
Mohammad Kamarchi, Gaithersburg, MD (US);
Michael B. Colson, Woodbine, MD (US);
Assignee:
Axcelis Technologies, Inc., Beverly, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 61/30 (2006.01); H01J 17/16 (2006.01); H01J 9/24 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.