The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
May. 03, 2005
Matthias Heller, Hohenahr, DE;
Gean Jack Hsu, Wetzlar, DE;
Frank Michel, Braunfels, DE;
Carl Zeiss SMT AG, Oberkochen, DE;
Abstract
A substrate-coating system and an associated substrate-heating method, wherein the substrate-coating system is equipped with a substrate holder () for holding at least one substrate at a coating position where it is coated on a coating side, and with a substrate heater (). The method includes heating at least one substrate that has been brought into such a system while it is being coated. The substrate heater includes a backside heater () for actively heating the substrate from its backside, i.e., that side opposite the side to be coated, while it is at its coating position. A heat-conducting element that is brought into thermal contact with a surface of the substrate may also be provided. Heater power is then regulated, based on the difference between the actual substrate temperature and a preset, desired, substrate temperature, and thereby limited such that the temperature of the heat-conducting element will not excessively increase over that of the substrate. The system and method are particularly applicable, e.g., to coating optical components fabricated from CaF.