The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 23, 2007
Filed:
May. 24, 2005
Applicants:
Paul C. Lindsey, Jr., Lafayette, CA (US);
Bradley B. Engel, Milford, NH (US);
Inventors:
Paul C. Lindsey, Jr., Lafayette, CA (US);
Bradley B. Engel, Milford, NH (US);
Assignee:
Micro Processing Technology, Inc., Lafayette, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B43L 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for controlling scribing forces when scribing a semiconductor wafer includes supporting a scribe tool on an air bearing shaft. An encoder reads an encoder scale attached to the air bearing shaft and transport structure moves the tool support structure up or down to control the scribing force responsive to signals from the encoder.
Lindsey, Jr., Paul. (2007). Apparatus and method for scribing a semiconductor wafer while controlling scribing forces (U.S. Patent No. 7165331). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7165331
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile