The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Mar. 28, 2005
Andrew D. Bailey, Iii, Pleasanton, CA (US);
Michael Leonard, Hayward, CA (US);
Benjamin W. Mooring, Austin, TX (US);
Candi Kristoffersen, San Jose, CA (US);
Andrew D. Bailey, III, Pleasanton, CA (US);
Michael Leonard, Hayward, CA (US);
Benjamin W. Mooring, Austin, TX (US);
Candi Kristoffersen, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method of determining an average electrical response to a conductive layer on a set of substrates vibrating about a vibration mean is disclosed. The method includes positioning a sensor near a position on a first substrate; and measuring a first plurality of electrical responses, wherein each of the first plurality of electrical responses is function of an electrical film property response and a first substrate proximity response. The method also includes positioning the sensor near the position on a second substrate; and measuring a second plurality of electrical responses, wherein each of the second plurality of electrical responses is function of the electrical film property response and a second substrate proximity response. The method further includes determining a first average electrical response for the first substrate and a second average electrical response for the second substrate, wherein a difference between an average first substrate proximity response and an average second substrate proximity response is about zero.