The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 16, 2007
Filed:
Jul. 29, 2003
William Dale Jones, Phoenix, AZ (US);
William Dale Jones, Phoenix, AZ (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
An apparatus for and methods of control of a fluid flow. In a system for supercritical processing of an object, the apparatus includes a measuring device for measuring a pump performance parameter and a controller for adjusting a fluid flow in response to the performance parameter. The system further includes a processing chamber for performing a supercritical process and a device for circulating at least one of a gaseous, liquid, supercritical and near-supercritical fluid within the processing chamber. A method of control of a fluid flow includes the steps of: measuring a pump performance parameter; comparing a measured pump performance parameter to a predetermined target pump performance parameter; and adjusting a fluid flow in response to a difference in the measured pump performance parameter and the predetermined target pump performance parameter.