The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 09, 2007
Filed:
Oct. 09, 2002
Applicants:
Dror Shemesh, Hod Hasharon, IL;
Dubi Shachal, Rehorot, IL;
Inventors:
Dror Shemesh, Hod Hasharon, IL;
Dubi Shachal, Rehorot, IL;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/14 (2006.01); H01J 37/21 (2006.01); H01J 3/28 (2006.01); H01J 37/256 (2006.01);
U.S. Cl.
CPC ...
Abstract
An apparatus and method for fast changing a focal length of a charged particle beam the method comprising the step of changing a control signal in response to a relationship between the control signal voltage value and the focal length of the charged particle beam.