The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Jun. 30, 2004
Applicant:
Reza M. Golzarian, Beaverton, OR (US);
Inventor:
Reza M. Golzarian, Beaverton, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); B44C 1/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate processing apparatus equipped to employ an energy directed at a process side of a substrate to enhance and control material removal is provided.
Quick Actions:
Golzarian, Reza. (2007). Energy enhanced surface planarization (U.S. Patent No. 7156947). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7156947
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile