The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
Apr. 03, 2002
Kurt Karl Christenson, Minnetonka, MN (US);
Nam Pyo Lee, Eden Prairie, MN (US);
Gary William Michalko, Ham Lake, MN (US);
Christina Ann Rathman, Bloomington, MN (US);
Kurt Karl Christenson, Minnetonka, MN (US);
Nam Pyo Lee, Eden Prairie, MN (US);
Gary William Michalko, Ham Lake, MN (US);
Christina Ann Rathman, Bloomington, MN (US);
FSI International, Inc., Chaska, MN (US);
Abstract
A method is provided for treating an object. In this method, a treating chemical is introduced to a bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid, followed by introducing non-treating liquid into the bath under conditions effective to at least partially envelop the object to be treated in eddy currents of the bath liquid. An apparatus for carrying out this method is also provided. This method is particularly beneficial for objects used in precision manufacturing by treatment with solutions, such as semiconductor wafers or similar substrates.