The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 02, 2007
Filed:
May. 21, 2005
Applicants:
Lin Huang, Goleta, CA (US);
Chanmin Su, Ventura, CA (US);
Inventors:
Lin Huang, Goleta, CA (US);
Chanmin Su, Ventura, CA (US);
Assignee:
Veeco Instruments Inc., Woodbury, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R 29/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
The preferred embodiments are directed to a method and apparatus of operating a scanning probe microscope (SPM) including oscillating a probe of the SPM at a torsional resonance of the probe, and generally simultaneously measuring an electrical property, e.g., a current, capacitance, impedance, etc., between a probe of the SPM and a sample at a separation controlled by the torsional resonance mode. Preferably, the measuring step is performed while using torsional resonance feedback to maintain a set-point of SPM operation.