The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Feb. 23, 2005
Roy C. Nangoy, Santa Clara, CA (US);
Allen L. D'ambra, Burlingame, CA (US);
Yevgeniy Rabinovich, Fremont, CA (US);
David Z. Chen, San Jose, CA (US);
Tao LI, Fremont, CA (US);
Roy C. Nangoy, Santa Clara, CA (US);
Allen L. D'Ambra, Burlingame, CA (US);
Yevgeniy Rabinovich, Fremont, CA (US);
David Z. Chen, San Jose, CA (US);
Tao Li, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method for controlling liquid delivery in a processing chamber. The method includes generating an analog input (AI) signal proportional to a process variable and calculating an analog output (AO) signal based on a setpoint and a deadband. The setpoint is a target value of the process variable and the deadband is an allowable tolerance around the setpoint that determines when the control logic is activated to control the process variable. The method further includes transmitting the AO signal to a control device and adjusting the process variable proportional to the value of the AO signal.