The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
Jul. 03, 2003
Koji Shigematsu, Kawasaki, JP;
Youhei Fujishima, Ageo, JP;
Yasuhiro Omura, Kumagaya, JP;
Toshiro Ishiyama, Saitama, JP;
Koji Shigematsu, Kawasaki, JP;
Youhei Fujishima, Ageo, JP;
Yasuhiro Omura, Kumagaya, JP;
Toshiro Ishiyama, Saitama, JP;
Nikon Corporation, Tokyo, JP;
Abstract
Provided is a projection optical system for forming an image of a pattern of a first object (R) on a second object (W). The projection optical system is made of an optical material having a refractive index of not more than 1.6 and is substantially telecentric both on the first object side and on the second object side. The projection optical system satisfies the condition of (λ×L)/(NA×Y)<1.5×10, where λ is a wavelength of light, L a distance between the first object and the second object, MA a numerical aperture on the second object side, and Ya maximum image height on the second object.