The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 26, 2006
Filed:
May. 25, 2005
Marek Hytha, Brookline, MA (US);
Robert John Stephenson, Newton Upper Falls, MA (US);
Scott A. Kreps, Southborough, MA (US);
Marek Hytha, Brookline, MA (US);
Robert John Stephenson, Newton Upper Falls, MA (US);
Scott A. Kreps, Southborough, MA (US);
RJ Mears, LLC, Waltham, MA (US);
Abstract
A method for making a semiconductor device may include forming a superlattice including a plurality of stacked groups of layers, with each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may also include performing at least one anneal prior to completing forming of the superlattice.