Electron beam system and electron beam measuring and observing methods

Abstract

To provide an electron beam system capable of performing three-dimensional measurement of a sample with high precision irrespective of the tilt angle and height of the sample. The electron beam system has a correction factor storing sectionfor storing a correction factor at a reference tilt angle with respect to a plane which is used to tilt a sample by a sample tilting section, an approximate coordinate measuring sectionfor obtaining an approximate shape or approximate coordinate values of the sample based on an output corresponding to a stereo image from an electron beam detecting section, an image correcting sectionfor correcting the stereo image according to the tilt angle created by the sample tilting sectionbased on the shape or coordinate values of the sample obtained in the approximate coordinate measuring sectionusing a correction factor stored in the correction factor storing section, and a precise coordinate measuring sectionfor obtaining a shape or coordinate values of the sample which are more precise than those obtained in the approximate coordinate measuring sectionbased on a corrected stereo image obtained in the image correcting section