The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 19, 2006
Filed:
Nov. 15, 2004
Peter D. Nunan, Monte Sereno, CA (US);
Sergey D. Lopatin, Santa Clara, CA (US);
Peter D. Nunan, Monte Sereno, CA (US);
Sergey D. Lopatin, Santa Clara, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A method for manufacturing a transistor is provided. The transistor has a substrate with an insulator on the substrate. A structure on the insulator having a structure sidewall is provided with spacers covering a portion of the structure sidewall. An exposed portion of the structure sidewall is activated, and a conformal layer of metal or metal containing material is deposited on the exposed portion of the structure sidewall. The metal or metal containing material is annealed to diffuse into the exposed portion of the structure sidewall to form a salicide.