The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2006
Filed:
Oct. 25, 2004
Nicolas Lallemant, Veldhovn, NL;
Marcel Beckers, Eindhoven, NL;
Stephan Koelink, Eindhoven, NL;
Rob Jansen, Veldhoven, NL;
Wladimir Fransiscus Gerardus Maria Hertog, Velden, NL;
David Theodorus Willy Van Der Plas, Eindhoven, NL;
Nicolas Lallemant, Veldhovn, NL;
Marcel Beckers, Eindhoven, NL;
Stephan Koelink, Eindhoven, NL;
Rob Jansen, Veldhoven, NL;
Wladimir Fransiscus Gerardus Maria Hertog, Velden, NL;
David Theodorus Willy Van Der Plas, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus includes a radiation system for providing a beam of radiation, and a first support for supporting a patterning device. The patterning device serves to pattern the beam of radiation. The apparatus includes a second support for supporting a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, and an interferometer measurement system for providing an interferometric measurement beam extending along an axis in an elongated volume of gas extending below the projection system. The apparatus also includes a gas conditioning structure for providing a conditioned gas flow in the volume. The gas conditioning structure includes a plurality of gas guiding vanes disposed at an outlet of the structure for guiding the gas flow to the volume. The gas guiding vanes are shaped continuously and are oriented diverging away from the axis of the volume.