The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2006
Filed:
Jan. 06, 2004
Applicants:
Jörg Schultz, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Inventors:
Jörg Schultz, Aalen, DE;
Johannes Wangler, Königsbronn, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/428 (2006.01); G03F 7/20 (2006.01); G21K 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided an illumination system. The illumination system includes a light source for emitting light having a wavelength ≦193 nm, an optical system, and a radiation protection wall situated between the light source and the optical system.