The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2006
Filed:
Dec. 16, 2002
Steven D. Boyd, Woodbury, MN (US);
Susrut Kesari, Santa Clara, CA (US);
William M. Lamanna, Stillwater, MN (US);
Michael J. Parent, Oakdale, MN (US);
Lawrence A. Zazzera, Edina, MN (US);
Haiyan Zhang, Woodbury, MN (US);
Steven D. Boyd, Woodbury, MN (US);
Susrut Kesari, Santa Clara, CA (US);
William M. Lamanna, Stillwater, MN (US);
Michael J. Parent, Oakdale, MN (US);
Lawrence A. Zazzera, Edina, MN (US);
Haiyan Zhang, Woodbury, MN (US);
3M Innovative Properties Company, St. Paul, MN (US);
Abstract
The present invention provides plating solutions having either copper bis(perfluoroalkanesulfonyl) imides or copper tris(perfluoroalkanesulfonyl) methides and methods of electrochemically or chemically depositing copper interconnects using these plating solutions.