The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Apr. 07, 2004
Applicants:
Uzi Lev-ami, Mountain View, CA (US);
Guenter Sifnatsch, Santa Clara, CA (US);
Mark Attwood, Morgan Hill, CA (US);
Inventors:
Uzi Lev-Ami, Mountain View, CA (US);
Guenter Sifnatsch, Santa Clara, CA (US);
Mark Attwood, Morgan Hill, CA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.