The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Nov. 23, 2004
Applicants:
Bearrach Moest, Eindhoven, NL;
Marcus Adrianus Van DE Kerkhof, Helmond, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Inventors:
Bearrach Moest, Eindhoven, NL;
Marcus Adrianus Van De Kerkhof, Helmond, NL;
Marc Antonius Maria Haast, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and lithographic apparatus in which a surface of a sensor is protected from dissolution in a liquid through application of a bias voltage to the surface with respect to one or more parts which are also exposed to the liquid.