The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2006
Filed:
Apr. 16, 2004
Applicants:
Edward R. Engbrecht, Austin, TX (US);
John G. Ekerdt, Austin, TX (US);
Yang-ming Sun, Austin, TX (US);
Kurt H. Junker, Austin, TX (US);
Inventors:
Edward R. Engbrecht, Austin, TX (US);
John G. Ekerdt, Austin, TX (US);
Yang-Ming Sun, Austin, TX (US);
Kurt H. Junker, Austin, TX (US);
Assignee:
Semiconductor Research Corporation, Durham, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention includes methods for forming a boron carbo-nitride layer. Additional embodiments include thermal chemical vapor deposition methods for forming a boron carbo-nitride layer. Also integrated circuit devices with a boron carbo-nitride layer are disclosed.
Engbrecht, Edward. (2006). Methods of forming boron carbo-nitride layers for integrated circuit devices (U.S. Patent No. 7144803). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7144803
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile