The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2006
Filed:
Oct. 07, 2005
Applicants:
Chris Mack, Austin, TX (US);
Robert Jones, Austin, TX (US);
Jeffrey Byers, Lexington, TX (US);
Inventors:
Assignee:
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01); G05B 13/02 (2006.01); G06G 7/48 (2006.01);
U.S. Cl.
CPC ...
Abstract
A computer-implemented method and a storage medium adapted to identify potential causes of lithography process failure or drift is provided.
Quick Actions:
Mack, Chris. (2006). Computer-implemented method and carrier medium configured to generate a set of process parameters and/or a list of potential causes of deviations for a lithography process (U.S. Patent No. 7142941). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7142941
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile