The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2006
Filed:
Mar. 31, 2004
Applicants:
Jeffrey Bogart, Los Gatos, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Inventors:
Jeffrey Bogart, Los Gatos, CA (US);
Bulent M. Basol, Manhattan Beach, CA (US);
Assignee:
ASM Nutool, Inc., Phoenix, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C25F 3/16 (2006.01); B23H 5/06 (2006.01); C25F 3/30 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electrochemical mechanical process for electroplating or electropolishing a conductive surface of a wafer is provided. The conductive surface of the wafer is touched by a polishing surface of a compressible pad while a process solution flows through the pad and a potential difference is maintained between the conductive surface and an electrode. The pressure between the polishing surface and a central region of the conductive surface is increased by applying a shaping process to either the conductive surface or the pad.