The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 28, 2006
Filed:
Jan. 20, 2004
Yuen-sheng Hua, Ping-Tung, TW;
Chi-shen Yang, Hsinchu County, TW;
Yuan-bang Lee, Tongsiao Township, Miaoli County, TW;
Ming-zhe Chiang, Hsinchu, TW;
Yuen-Sheng Hua, Ping-Tung, TW;
Chi-Shen Yang, Hsinchu County, TW;
Yuan-Bang Lee, Tongsiao Township, Miaoli County, TW;
Ming-Zhe Chiang, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Co., Hsin-Chu, TW;
Abstract
An interlocking lid which is suitable for a wet bench tank used in the processing of semiconductor wafer substrates. The interlocking lid includes a pair of lid panels typically provided with a clasp having elements for engaging and interlocking with each other when the lid panels are in a closed position. At least one of the lids may further include a beveled lid shoulder which facilitates runoff of liquids from and hinders pooling of liquids on the exterior surface of the lid.