The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Jun. 24, 2002
Ali Shajii, Canton, MA (US);
Nicholas Kottenstette, Newburyport, MA (US);
Jesse Ambrosina, Topsfield, MA (US);
Ali Shajii, Canton, MA (US);
Nicholas Kottenstette, Newburyport, MA (US);
Jesse Ambrosina, Topsfield, MA (US);
MKS Instruments, Inc., Wilmington, MA (US);
Abstract
A mass flow sensor calibrator employs a variable-flow fluid source, a receptacle of known volume, and a pressure differentiator. The variable-flow fluid source supplies gas at varying rates to the mass flow sensor being calibrated and at proportional rates to a receptacle of known volume. A pressure differentiator computes the time derivative of gas flow into the receptacle of known volume and, from that, the actual flow into the receptacle. Given the actual flow, the proportionate flow into the mass flow sensor may be determined and the flow signal from the mass flow sensor correlated to the actual flow.