The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Jul. 09, 2004
Qinsong Steve Wang, Saratoga, CA (US);
Tzong Tsong Miau, Sunnyvale, CA (US);
Theodore R. Lundquist, Milpitas, CA (US);
Qinsong Steve Wang, Saratoga, CA (US);
Tzong Tsong Miau, Sunnyvale, CA (US);
Theodore R. Lundquist, Milpitas, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
A charged particle guide adapted to be coupled with a charged particle detector, such as a secondary electron detector. The charged particle guide, in one example, comprising two wires extending from the charged particle detector toward a source of charged particles, such as secondary electrons emitted from an IC upon application of a focused ion beam. Upon application of a bias voltage, the charged particle guide introduces a collecting electric field that attracts charged particles and directs the charged particles to the charged particles detector.