The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Dec. 04, 2003
Applicants:
Kwang-wook Lee, Kwacheon, KR;
Im-soo Park, Seoul, KR;
Kun-tack Lee, Suwon, KR;
Young-min Kwon, Suwon, KR;
Sang-rok Hah, Seoul, KR;
Inventors:
Kwang-wook Lee, Kwacheon, KR;
Im-soo Park, Seoul, KR;
Kun-tack Lee, Suwon, KR;
Young-min Kwon, Suwon, KR;
Sang-rok Hah, Seoul, KR;
Assignee:
Samsung Electronics, Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); C25F 3/30 (2006.01); C09K 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A cleaning solution for use in removing a damaged portion of a ferroelectric layer, and a cleaning method using the solution. The cleaning solution includes a fluoride, an organic acid with carboxyl group, an alkaline pH adjusting agent and water.