The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2006

Filed:

Nov. 14, 2003
Applicants:

Myung Kwan Ryu, Seoul, KR;

Ho Nyeon Lee, Kyoungki-do, KR;

Jae Chul Park, Seoul, KR;

Eok Su Kim, Seoul, KR;

Inventors:

Myung Kwan Ryu, Seoul, KR;

Ho Nyeon Lee, Kyoungki-do, KR;

Jae Chul Park, Seoul, KR;

Eok Su Kim, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to a method for fabricating a single crystal silicon thin film at the desired location to the desired size from an amorphous or polycrystalline thin film on a substrate using laser irradiation and laser beam movement along the substrate having the semiconductor thin films being irradiated. This method comprises the steps of: forming a semiconductor layer or a metal thin film on a transparent or semi-transparent substrate; forming a single crystal seed region on the substrate of the desired size by a crystallization method using laser irradiation; and converting the desired region of the semiconductor layer or metal thin film into a single crystal region, using the single crystal seed region.


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Ryu, Myung. (2006). Method for fabricating single crystal silicon film (U.S. Patent No. 7135388). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7135388

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