The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 14, 2006
Filed:
Jan. 14, 2004
Mark Alan Thompson, Austin, TX (US);
Erwan Le Roy, Newark, CA (US);
Theodore Lundquist, Milpitas, CA (US);
William B. Thompson, Loa Altos, CA (US);
Catherine Kardach, Saratoga, CA (US);
Mark Alan Thompson, Austin, TX (US);
Erwan Le Roy, Newark, CA (US);
Theodore Lundquist, Milpitas, CA (US);
William B. Thompson, Loa Altos, CA (US);
Catherine Kardach, Saratoga, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
The backside navigation method of the present invention includes milling a fiducial opening through the substrate of an integrated circuit. The milling process is stopped when the fiducial opening reaches the bottom of a trench isolation structure. The trench isolation structure delineated by the fiducial opening may be imaged and registered to a computer aided design layout image to achieve sub-micron navigation resolution.