The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 2006
Filed:
Jul. 03, 2003
Masami Iizuka, Ishioka, JP;
Shigeru Matsui, Hitachinaka, JP;
Tadashi Suzuki, Kasama, JP;
Hiroshi Goto, Ushiku, JP;
Takayuki Ono, Hitachinaka, JP;
Masami Iizuka, Ishioka, JP;
Shigeru Matsui, Hitachinaka, JP;
Tadashi Suzuki, Kasama, JP;
Hiroshi Goto, Ushiku, JP;
Takayuki Ono, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A lighting optical machine and defect inspection system having high reliability and safety when a laser beam is used as a light source. The lighting optical machine comprises: a housing, which accommodates a laser source, a beam polarization mechanism having first and second plane mirrors enabling a beam emitted from the laser source to be reflected so that the beam travels in the direction almost parallel to the beam emitted from the laser source, a beam expander for converting the beam to a parallel beam having a larger cross-sectional area, an objective lens, through which the parallel beam is reduced and applied to the surface of a sample; a first control mechanism for controlling the directions of the two plane mirrors of the beam polarization mechanism with an electric signal; and a second control mechanism for controlling the focus position of the beam expander with an electric signal.